Using nano-level grinding technology and high-hardness alloy steel material, carburizing quenching and DLC (diamond-like carbon) coating strengthening treatment, it achieves ultra-high repeat positioning accuracy of ±0.002mm (C3 level), backlash ≤0.0015mm, and industry-leading rigidity and wear resistance.
The single nut preload anti-backlash structure is combined with a micro-end cap ball circulation system, with a rated dynamic load of 3~5kN, a maximum speed of 10000~12000rpm, and supports extreme temperature ranges from -40°C to 150°C, and is compatible with harsh environments such as vacuum, high humidity, and radiation.
The lightweight design (total weight is about 0.5~0.8kg) and ultra-low friction optimization ensure ultra-high frequency response, extreme silence and ultra-long life. It is suitable for sub-nanometer motion control of precision translation stages for quantum computing equipment, nano-level focusing systems for semiconductor EUV lithography machines, fine-tuning mechanisms for spacecraft optical loads, atomic force microscope probe positioning, and ultra-precision photonic devices.
The selection must strictly match the dynamic load and acceleration curve. Special vacuum lubrication solutions and high-frequency calibration maintenance are recommended. The core advantages are nanometer-level precision, extreme dynamic response and multi-environment compatibility. It is the core transmission unit in cutting-edge scientific research, semiconductors and quantum technology fields (parameters are subject to the manufacturer’s technical manual).
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